Universal Pulse Generators

RUP with tube technology

The high-voltage pulse generators of the RUP1-2 and RUP4-5 series were designed for negative pulses based on electron tubes. The tetrode is connected in parallel to the load, with a cathode-potential close to ground. The output is capacively coupled and principally potential free. A great advantage of tube topology is, that they are inherent current-limited and insensitive to short-term overloads. However, tube topology also has disadvantages. Thus, the devices are not scalable, the selection of suitable tetrodes was / is limited. During operation, x-ray radiation is generated, which must be shielded with lead. In addition an approval is neccessary.

Basic data of the pulse generators with electron tubes in retrospect:

RUP1 Tetrode TH5188
Umax up to 100kV; Imax up to 10A; ^PAverage up to 1.5kW

RUP2 Tetrode 4PR250C
Umax up to 50kV; Imax up to 4A; ^PAverage up to 1kW

RUP4 Tube 8960
Umax up to 45kV; Imax up to 32A; ^PAverage up to 8kW

RUP5 Tube Y546
Umax up to 60kV Imax up to 10A; ^PAverage up to 10kW

Main application:

Plasma immersion ion implantation

Remark:

The GBS Elektronik GmbH has discontinued the production of pulse generators based on electron tubes. In special cases, the advantages of tube technology can not be replaced 100% by other technologies.Therefore, a project is conceivable upon justified request.

Downloads RUP with tube technology

PDF Data sheet RUP4-1B German

Further variants can be found in our download section >>

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References of GBS Elektronik GmbH